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1 January 2004 Hot-Lot Equivalent of Publishing—The Immersion Special Section
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This PDF file contains the editorial “Hot-Lot Equivalent of Publishing—The Immersion Special Section” for JM3 Vol. 3 Issue 01
©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)
Burn J. Lin "Hot-Lot Equivalent of Publishing—The Immersion Special Section," Journal of Micro/Nanolithography, MEMS, and MOEMS 3(1), (1 January 2004). https://doi.org/10.1117/1.1640618
Published: 1 January 2004
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