1 July 2004 Fabrication of microstructures in photoetchable glass ceramics using excimer and femtosecond lasers
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Abstract
We discuss laser fabrication of microstructures in photoetchable glass ceramics called Foturan (Schott Company, Elmsford, NY). A KrF excimer laser (λ = 248 nm, τ = 25 ns) is used for surface micromachining, and a femtosecond laser (λ = 800 nm, τ = 80 fs) is used for fabricating 3-D structures. Important aspects of the machining, such as depth of machining resulting from different laser processing parameters and threshold laser fluences, are presented. A detailed analysis of the absorption process of both lasers in photoetchable glass ceramics is provided.
Joohan Kim, Halil Berberoglu, Xianfan Xu, "Fabrication of microstructures in photoetchable glass ceramics using excimer and femtosecond lasers," Journal of Micro/Nanolithography, MEMS, and MOEMS 3(3), (1 July 2004). https://doi.org/10.1117/1.1759330
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