1 July 2004 Microelectromechanical system switching isolation amplifier for low frequency measurement
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Abstract
A microelectromechanical systems (MEMS) isolation amplifier is presented, which uses MEMS switches to realize a "flying capacitor" structure. This isolation amplifier has the advantages of simple circuit structures, smaller dimensions, low cost, excellent electromagnetic compatibility (EMC) performance, easy to make multichannel isolation circuits, integration compatibility with on-chip electronics, etc. The performance of the MEMS switch exhibits 30-V pull-in voltage, 35-μs time delay, and 110-V breakdown voltage. The preliminary performance of the isolation amplifier is also demonstrated. To our knowledge, this work presents the first MEMS isolation amplifier structure.
Miao Lu, Zhengping Zhao, Xiaodong Hu, Xuefeng Zou, Hejun Guo, "Microelectromechanical system switching isolation amplifier for low frequency measurement," Journal of Micro/Nanolithography, MEMS, and MOEMS 3(3), (1 July 2004). http://dx.doi.org/10.1117/1.1758950
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KEYWORDS
Switches

Microelectromechanical systems

Optical amplifiers

Switching

Capacitors

Silicon

Electrodes

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