Microelectromechanical system switching isolation amplifier for low frequency measurement

Miao Lu; Zhengping Zhao; Xiaodong Hu; Xuefeng Zou; Hejun Guo

doi:10.1117/1.1758950

1 July 2004 Microelectromechanical system switching isolation amplifier for low frequency measurement

Miao Lu, Zhengping Zhao, Xiaodong Hu, Xuefeng Zou, Hejun Guo

Author Affiliations +

J. of Micro/Nanolithography, MEMS, and MOEMS, 3(3), (2004). https://doi.org/10.1117/1.1758950

Abstract

A microelectromechanical systems (MEMS) isolation amplifier is presented, which uses MEMS switches to realize a "flying capacitor" structure. This isolation amplifier has the advantages of simple circuit structures, smaller dimensions, low cost, excellent electromagnetic compatibility (EMC) performance, easy to make multichannel isolation circuits, integration compatibility with on-chip electronics, etc. The performance of the MEMS switch exhibits 30-V pull-in voltage, 35-μs time delay, and 110-V breakdown voltage. The preliminary performance of the isolation amplifier is also demonstrated. To our knowledge, this work presents the first MEMS isolation amplifier structure.

Citation Download Citation

Miao Lu, Miao Lu, Zhengping Zhao, Zhengping Zhao, Xiaodong Hu, Xiaodong Hu, Xuefeng Zou, Xuefeng Zou, Hejun Guo, Hejun Guo, } "Microelectromechanical system switching isolation amplifier for low frequency measurement," Journal of Micro/Nanolithography, MEMS, and MOEMS 3(3), (1 July 2004). https://doi.org/10.1117/1.1758950 . Submission:

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $20.00

Non-members: $25.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years