1 October 2004 Numerical method to predict and fabricate aspherical microlens arrays using 248-nm excimer laser ablation
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Abstract
A method of numerical simulations is used to predict the profile of a 3-D aspherical microlens array. Based on the simulated results, the desired micro-optical lens profile is obtained through excimer laser ablation. The simulation method applied in the excimer laser ablation can significantly reduce the quantity of microablation experiments. The ablated microstructures with surface average roughness of Ra<20 nm are successfully achieved for micro-optical components. The excimer laser ablation parameters include laser fluence, shot number, workstation scanning velocity, and repetition rate. Various profiles of microlens and microprism arrays with different dimensions can utilize numerical simulation and form desired geometries by laser ablation.
C. T. Pan, S. Shen, Chi-Chang Hsieh, Chi-Hui Chien, Yung-Chang Chen, "Numerical method to predict and fabricate aspherical microlens arrays using 248-nm excimer laser ablation," Journal of Micro/Nanolithography, MEMS, and MOEMS 3(4), (1 October 2004). http://dx.doi.org/10.1117/1.1794178
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KEYWORDS
Laser ablation

Excimer lasers

Microlens array

Microlens

Numerical analysis

Optical simulations

Photomasks

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