1 October 2004 Ultrathick SU-8 fabrication for microreciprocating engines
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Abstract
We present a high-quality UV-lithography process for making high aspect ratio microstructures for microengines using an ultrathick SU-8 photoresist layer. The microreciprocating engine project, which is ongoing at the University of Birmingham, aims to develop a compact power plant to replace batteries. The design of the microengine imposes strict requirements on the geometry of the engine components. The microfabrication research work has been concentrated on developing a SU-8 UV-lithography process to achieve good sidewall angles and high aspect ratio. Based on the study of the photoactive property of ultrathick SU-8 layers, an optimized prebake time is found for obtaining the minimum UV absorption of SU-8. The optimization process is tested and proven effective using a series of UV-lithography experiments on different prebake times. Microstructures with aspect ratios as high as 40:1 are produced in 1000-µm ultrathick SU-8 layers using standard UV-lithography equipment. The sidewall angles are controlled between 85 to 90 deg. The engine components fabricated using this process satisfy microengine design requirements.
Peng Jin, Kyle C. Jiang, Nianjun Sun, "Ultrathick SU-8 fabrication for microreciprocating engines," Journal of Micro/Nanolithography, MEMS, and MOEMS 3(4), (1 October 2004). https://doi.org/10.1117/1.1793155
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