1 July 2005 High-frame-rate deep-ultraviolet-optimized charge-coupled device for simultaneous measurements of illumination intensity, polarization amplitude, and polarization direction for very high numerical aperture imaging systems
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J. of Micro/Nanolithography, MEMS, and MOEMS, 4(3), 031105 (2005). doi:10.1117/1.2032888
Abstract
Lincoln Laboratory has designed and fabricated a charge-coupled device (CCD) array capable of imaging both polarization and illumination uniformity. The device consists of an 1107-element linear array of UV-optimized silicon photodiodes readout by a three-stage CCD through a single ~1-MHz output amplifier. This yields an effective clock rate for the whole array of ~1 kHz. Each of the active diode surfaces within the 1107-element array is covered by a UV-opaque layer of polysilicon into which are patterned 140-nm, transmissive sampling slits. The orientation and location of the slits enables simultaneous determination of illumination uniformity, degree and direction of polarization, and polarization uniformity. The device is tested with a 193-nm excimer laser equipped with variably polarized illumination and the theoretical performance of the device was supported by finite-difference time domain optical simulations.
Roderick R. Kunz, Dennis D. Rathman, Steven J. Spector, Michael Rose, Michael S. Yeung, "High-frame-rate deep-ultraviolet-optimized charge-coupled device for simultaneous measurements of illumination intensity, polarization amplitude, and polarization direction for very high numerical aperture imaging systems," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(3), 031105 (1 July 2005). http://dx.doi.org/10.1117/1.2032888
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KEYWORDS
Polarization

Diodes

Charge-coupled devices

Imaging systems

Photodiodes

Imaging arrays

Photomicroscopy

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