1 July 2005 High-frame-rate deep-ultraviolet-optimized charge-coupled device for simultaneous measurements of illumination intensity, polarization amplitude, and polarization direction for very high numerical aperture imaging systems
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Abstract
Lincoln Laboratory has designed and fabricated a charge-coupled device (CCD) array capable of imaging both polarization and illumination uniformity. The device consists of an 1107-element linear array of UV-optimized silicon photodiodes readout by a three-stage CCD through a single ~1-MHz output amplifier. This yields an effective clock rate for the whole array of ~1 kHz. Each of the active diode surfaces within the 1107-element array is covered by a UV-opaque layer of polysilicon into which are patterned 140-nm, transmissive sampling slits. The orientation and location of the slits enables simultaneous determination of illumination uniformity, degree and direction of polarization, and polarization uniformity. The device is tested with a 193-nm excimer laser equipped with variably polarized illumination and the theoretical performance of the device was supported by finite-difference time domain optical simulations.
© (2005) Society of Photo-Optical Instrumentation Engineers (SPIE)
Roderick R. Kunz, Roderick R. Kunz, Dennis D. Rathman, Dennis D. Rathman, Steven J. Spector, Steven J. Spector, Michael Rose, Michael Rose, Michael S. Yeung, Michael S. Yeung, } "High-frame-rate deep-ultraviolet-optimized charge-coupled device for simultaneous measurements of illumination intensity, polarization amplitude, and polarization direction for very high numerical aperture imaging systems," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(3), 031105 (1 July 2005). https://doi.org/10.1117/1.2032888 . Submission:
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