1 July 2005 Short-wavelength ablation of molecular solids: pulse duration and wavelength effects
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For conventional wavelength (UV-vis-IR) lasers delivering radiation energy to the surface of materials, ablation thresholds, ablation (etch) rates, and the quality of ablated structures often differ dramatically between short (typically nanosecond) and ultrashort (typically femtosecond) pulses. Various short-wavelength (λ<100 nm) lasers emitting pulses with durations ranging from ~10 fs to ~1 ns have recently been put into routine operation. This makes it possible to investigate how ablation characteristics depend on pulse duration in the XUV spectral region. Four sources of intense short-wavelength radiation available in the authors' laboratories, including XUV and soft x-ray lasers, are used for the ablation experiments. Based on the results of the experiments, the etch rates for three different pulse durations are compared using the XUV-ABLATOR code to compensate for the wavelength difference. Comparing the values of etch rates calculated for nanosecond pulses with those measured for shorter pulses, we can study the influence of pulse duration on XUV ablation efficiency. The results of the experiments also show that the ablation rate increases while the wavelength decreases from the XUV spectral region toward x-rays, mainly due to increase of attenuation lengths at short wavelengths.
© (2005) Society of Photo-Optical Instrumentation Engineers (SPIE)
Libor Juha, Libor Juha, Michal Bittner, Michal Bittner, Dagmar Chvostova, Dagmar Chvostova, Josef Krasa, Josef Krasa, Michaela Kozlov, Michaela Kozlov, Miroslav Pfeifer, Miroslav Pfeifer, Jiri Polan, Jiri Polan, Ansgar R. Präg, Ansgar R. Präg, Bedrich Rus, Bedrich Rus, Michal Stupka, Michal Stupka, Josef Feldhaus, Josef Feldhaus, Vit Letal, Vit Letal, Zdenek Otcenasek, Zdenek Otcenasek, Jacek Krzywinski, Jacek Krzywinski, Robert Nietubye, Robert Nietubye, Jerzy B. Pelka, Jerzy B. Pelka, Andrzej Andrejczuk, Andrzej Andrejczuk, Ryszard Sobierajski, Ryszard Sobierajski, Leszek Ryc, Leszek Ryc, Frederick P. Boody, Frederick P. Boody, Henryk Fiedorowicz, Henryk Fiedorowicz, Andrzej S. Bartnik, Andrzej S. Bartnik, Janusz Mikolajczyk, Janusz Mikolajczyk, Rafal Rakowski, Rafal Rakowski, Pavel Kubát, Pavel Kubát, Ladislav Pína, Ladislav Pína, Martin Horváth, Martin Horváth, Michael E. Grisham, Michael E. Grisham, Georgiy O. Vaschenko, Georgiy O. Vaschenko, Carmen S. Menoni, Carmen S. Menoni, Jorge J. Rocca, Jorge J. Rocca, } "Short-wavelength ablation of molecular solids: pulse duration and wavelength effects," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(3), 033007 (1 July 2005). https://doi.org/10.1117/1.2037467 . Submission:


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