1 July 2005 Structure design of a 2-D high-aspect-ratio resonant microbeam accelerometer
Author Affiliations +
J. of Micro/Nanolithography, MEMS, and MOEMS, 4(3), 033009 (2005). doi:10.1117/1.2037070
Abstract
An accelerometer with concise structure having a resonant microbeam to measure 2-D acceleration is proposed. This structure is configured with a central proof mass suspended by four symmetrical and orthogonal high-aspect-ratio (HAR) microbeams. This dual-axis design is able to decouple a two-axis signal from a 2-D acceleration. An analytical model relating the linear relationship between the acceleration and the associated resonant frequency shift of microbeam is derived, and a finite element analysis (FEA) is also performed to confirm this model. The FEA result also shows that there is little cross talk between x and y directions of measurement, meaning that this structure is able to decouple a planar 2-D acceleration into two independent acceleration components, and therefore the 1-D analytical model can be used to evaluate the 2-D acceleration on the x-y plane. In addition, the model is verified by testing results of one conventional dual-axis natural frequency shifted microaccelerometer (DFSM). The simulation result also shows that the sensitivity of the proposed HAR accelerometer is triple that of a conventional DFSM.
Deng-Huei Hwang, Kan-Ping Chin, Yi-Chung Lo, Wensyang Hsu, "Structure design of a 2-D high-aspect-ratio resonant microbeam accelerometer," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(3), 033009 (1 July 2005). http://dx.doi.org/10.1117/1.2037070
JOURNAL ARTICLE
8 PAGES


SHARE
KEYWORDS
Finite element methods

Structural design

Capacitors

Data modeling

Molecular bridges

Electrodes

Magnesium

Back to Top