1 October 2005 Micromachined electromagnetic variable optical attenuator for optical power equalization
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A novel micromachined electromagnetic actuated variable optical attenuator is described. The attenuation level is adjusted by changing the lateral distance between two V-groove-aligned single-mode fibers. Based on the waveguide transmission theory, the relationship between the attenuation and the offset is analyzed. The fabrication of the device only enrolls common and well-known semiconductor technologies. The packaged volume of the device is 20×10×5 mm3. According to the experiment results, the insertion loss is less than 1 dB, the polarization dependent loss is less than 0.1 dB, dynamic range is larger than 50 dB, and the driving voltage is less than 5 V. It is proven to be a low-cost, high-performance passive device for future all-optical networks.
Xuhan Dai, Xiaolin Zhao, Guifu Ding, Bingchu Cai, "Micromachined electromagnetic variable optical attenuator for optical power equalization," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(4), 041304 (1 October 2005). https://doi.org/10.1117/1.2120648

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