1 October 2005 Micromachined electromagnetic variable optical attenuator for optical power equalization
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A novel micromachined electromagnetic actuated variable optical attenuator is described. The attenuation level is adjusted by changing the lateral distance between two V-groove-aligned single-mode fibers. Based on the waveguide transmission theory, the relationship between the attenuation and the offset is analyzed. The fabrication of the device only enrolls common and well-known semiconductor technologies. The packaged volume of the device is 20×10×5 mm3. According to the experiment results, the insertion loss is less than 1 dB, the polarization dependent loss is less than 0.1 dB, dynamic range is larger than 50 dB, and the driving voltage is less than 5 V. It is proven to be a low-cost, high-performance passive device for future all-optical networks.
© (2005) Society of Photo-Optical Instrumentation Engineers (SPIE)
Xuhan Dai, Xuhan Dai, Xiaolin Zhao, Xiaolin Zhao, Guifu Ding, Guifu Ding, Bingchu Cai, Bingchu Cai, "Micromachined electromagnetic variable optical attenuator for optical power equalization," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(4), 041304 (1 October 2005). https://doi.org/10.1117/1.2120648

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