1 October 2005 Closed-loop adaptive control for electrostatically driven torsional micromirrors
Author Affiliations +
J. of Micro/Nanolithography, MEMS, and MOEMS, 4(4), 041503 (2005). doi:10.1117/1.2110145
Abstract
We demonstrate a closed-loop adaptive control scheme for achieving accurate positioning and trajectory tracking of an electrostatically driven torsional micromirror. Compared to the conventional proportional-integral-derivative (PID) controller, the proposed adaptive self-tuning controller has advantages of on-line compensating parameter variations and model uncertainty of the torsional micromirror, resulting from fabrication imperfections. Numerical simulation results utilizing MATLAB indicate that the proposed adaptive controller has a better transient response and can more precisely follow the reference trajectory, compared to the PID control scheme. The torsional micromirror is designed and successfully fabricated using surface micromachining processes. Real-time experimental results demonstrate that the proposed adaptive control is feasible and can improve the performance of the micromirror.
Ke-Min Liao, Yi-Chih Wang, Chih-Hsien Yeh, Rongshun Chen, "Closed-loop adaptive control for electrostatically driven torsional micromirrors," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(4), 041503 (1 October 2005). http://dx.doi.org/10.1117/1.2110145
JOURNAL ARTICLE
9 PAGES


SHARE
KEYWORDS
Micromirrors

Adaptive control

Capacitance

Device simulation

Electrodes

Control systems

Microopto electromechanical systems

Back to Top