1 October 2005 Polymer stretching to produce flat suspended micromembranes
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Abstract
A microfabrication technique specifically applicable for making structures with thin, flat air gaps is presented. The technique relies upon heating a polymer causing it to contract and form a stretched micromembrane across stationary platforms. To validate and quantify this process, structures were made using SU8, a spin-on photosensitive epoxy, as the polymer attached to a silicon substrate. The stretching of the SU8 in these structures for different heat treatments was characterized using a mechanical profilometer. Optical interference effects were also used to evaluate the overall flatness of these structures based on the reflected colors across their surfaces. SU8 membranes up to 200 micrometers wide were successfully stretched flat with variations in the underlying air-gap thickness of less than 20 nm.
© (2005) Society of Photo-Optical Instrumentation Engineers (SPIE)
Kevin J. Campbell, Kevin J. Campbell, Jacey C. Morine, Jacey C. Morine, Zachary A. George, Zachary A. George, Craig P. Lusk, Craig P. Lusk, Larry Howell, Larry Howell, Stephen M. Schultz, Stephen M. Schultz, Aaron R. Hawkins, Aaron R. Hawkins, } "Polymer stretching to produce flat suspended micromembranes," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(4), 043005 (1 October 2005). https://doi.org/10.1117/1.2075267 . Submission:
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