1 January 2006 Modeling and optimization of the hot embossing process for micro- and nanocomponent fabrication
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J. of Micro/Nanolithography, MEMS, and MOEMS, 5(1), 011005 (2006). doi:10.1117/1.2176729
Abstract
Hot embossing and injection molding belong to the established plastic molding processes in microengineering. Based on experimental findings, a variety of microstructures have been replicated using these processes. However, with increasing requirements regarding the embossing surface, and the simultaneous decrease of the structure size down into the nanorange, increasing know-how is needed to adapt hot embossing to industrial standards. To reach this objective, a German-Canadian cooperation project has been launched to study hot embossing theoretically by process simulation and experimentally. The present publication reports on the proceeding and present first results.
M. Worgull, Mathias P. Heckele, J. F. Hétu, K. K. Kabanemi, "Modeling and optimization of the hot embossing process for micro- and nanocomponent fabrication," Journal of Micro/Nanolithography, MEMS, and MOEMS 5(1), 011005 (1 January 2006). https://doi.org/10.1117/1.2176729
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