1 January 2006 Replication of deep x-ray lithography fabricated microstructures through casting of soft material
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Abstract
We introduce simple double-casting replication methods for high-aspect-ratio microstructures fabricated by deep x-ray lithography using intermediate molds of soft materials. Two types of soft material are investigated. The ability to fabricate polymethylsiloxane (PDMS) molds with well-type structures with aspect ratios up to 35:1 is demonstrated for structure densities below 50%, and the reproduction from this mold of pillar-type polymethyl methacrylate (PMMA) structures with aspect ratios of 20:1 is achieved. Polyvinyl alcohol (PVA), a water soluble polymer, is also tested as a sacrificial intermediate mold and successfully used for the replication of structures with aspect ratios up to 5:1. Double-casting replication methods are described and discussed for their potential improvement.
© (2006) Society of Photo-Optical Instrumentation Engineers (SPIE)
Frederic Perennes, Frederic Perennes, B. Marmirolli, B. Marmirolli, Massimo Tormen, Massimo Tormen, Maurizio Matteucci, Maurizio Matteucci, Enzo M. Di Fabrizio, Enzo M. Di Fabrizio, } "Replication of deep x-ray lithography fabricated microstructures through casting of soft material," Journal of Micro/Nanolithography, MEMS, and MOEMS 5(1), 011007 (1 January 2006). https://doi.org/10.1117/1.2176730 . Submission:
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