1 January 2006 Optical characterization of diffractive optical elements replicated in polymers
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J. of Micro/Nanolithography, MEMS, and MOEMS, 5(1), 013004 (2006). doi:10.1117/1.2170098
Abstract
We present an optical laser-based method to visualize replication of microperiodic profile structures in polymers. Diffraction efficiency of diffraction gratings (originally produced in silicon, quartz glass, and in replicated polymer substrates) is measured experimentally and simulated using linear dimensions of gratings, or their replica defined by atomic force microscopy (AFM). Diffraction efficiency of the periodic structure is used to test the surface relief formation during the combined ion etching of crystalline Si (100) and replication of this structure using UV light hardening and hot embossing. The main experimental results are compared with computer simulations where the standard program (PCGrate-SX6.0) is employed. Angular dependence of relative efficiency (RE) appears a versatile tool to analyze the process of origination and replication of diffraction grating in a micrometer range. Both the shape of the grating and linear dimensions can be reconstructed by comparing experimental values of relative efficiency with the simulation results. Examples of hot embossing of different periods of diffraction gratings to the Al/polymethyl methacrylate (PMMA) on polyethylene terephthalate (PET) illustrate vitality of such approach.
Sigitas Tamulevicius, Asta Guobiene, Giedrius Janusas, Arvydas Palevicius, Vytautas Ostasevicius, Mindaugas Andrulevicius, "Optical characterization of diffractive optical elements replicated in polymers," Journal of Micro/Nanolithography, MEMS, and MOEMS 5(1), 013004 (1 January 2006). http://dx.doi.org/10.1117/1.2170098
JOURNAL ARTICLE
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KEYWORDS
Diffraction gratings

Diffraction

Polymers

Silicon

Nickel

Ultraviolet radiation

Atomic force microscopy

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