1 January 2006 Optical characterization of diffractive optical elements replicated in polymers
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Abstract
We present an optical laser-based method to visualize replication of microperiodic profile structures in polymers. Diffraction efficiency of diffraction gratings (originally produced in silicon, quartz glass, and in replicated polymer substrates) is measured experimentally and simulated using linear dimensions of gratings, or their replica defined by atomic force microscopy (AFM). Diffraction efficiency of the periodic structure is used to test the surface relief formation during the combined ion etching of crystalline Si (100) and replication of this structure using UV light hardening and hot embossing. The main experimental results are compared with computer simulations where the standard program (PCGrate-SX6.0) is employed. Angular dependence of relative efficiency (RE) appears a versatile tool to analyze the process of origination and replication of diffraction grating in a micrometer range. Both the shape of the grating and linear dimensions can be reconstructed by comparing experimental values of relative efficiency with the simulation results. Examples of hot embossing of different periods of diffraction gratings to the Al/polymethyl methacrylate (PMMA) on polyethylene terephthalate (PET) illustrate vitality of such approach.
© (2006) Society of Photo-Optical Instrumentation Engineers (SPIE)
Sigitas Tamulevicius, Sigitas Tamulevicius, Asta Guobiene, Asta Guobiene, Giedrius Janusas, Giedrius Janusas, Arvydas Palevicius, Arvydas Palevicius, Vytautas Ostasevicius, Vytautas Ostasevicius, Mindaugas Andrulevicius, Mindaugas Andrulevicius, } "Optical characterization of diffractive optical elements replicated in polymers," Journal of Micro/Nanolithography, MEMS, and MOEMS 5(1), 013004 (1 January 2006). https://doi.org/10.1117/1.2170098 . Submission:
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