1 April 2006 Novel microfabrication approach of embedded SU8TM fluidic networks for cell transport on chips
Author Affiliations +
J. of Micro/Nanolithography, MEMS, and MOEMS, 5(2), 021102 (2006). doi:10.1117/1.2200674
Abstract
We focus on the development and fabrication of SU8TM-based microchannel networks, which can be integrated into microdevices for fast drug delivery and cell transport on chips. Instead of using sacrificial materials or wafer bonding, a new simplified fabrication method is developed. Single- and double-layered SU8TM channels on silicon substrates are successfully achieved by using this new method, as well as integration of these SU8 channels with microelectrode arrays. A series of cell transport experiments is also successfully performed on these devices. This new fabrication approach and the resulting cell transport experiments are discussed in detail.
Alison Gracias, Xiaojun Feng, Bai Xu, James Castracane, "Novel microfabrication approach of embedded SU8TM fluidic networks for cell transport on chips," Journal of Micro/Nanolithography, MEMS, and MOEMS 5(2), 021102 (1 April 2006). http://dx.doi.org/10.1117/1.2200674
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KEYWORDS
Ultraviolet radiation

Fourier transforms

Microfabrication

Microfluidics

Silicon

Biosensors

Semiconducting wafers

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