1 April 2006 Novel microfabrication approach of embedded SU8TM fluidic networks for cell transport on chips
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Abstract
We focus on the development and fabrication of SU8TM-based microchannel networks, which can be integrated into microdevices for fast drug delivery and cell transport on chips. Instead of using sacrificial materials or wafer bonding, a new simplified fabrication method is developed. Single- and double-layered SU8TM channels on silicon substrates are successfully achieved by using this new method, as well as integration of these SU8 channels with microelectrode arrays. A series of cell transport experiments is also successfully performed on these devices. This new fabrication approach and the resulting cell transport experiments are discussed in detail.
© (2006) Society of Photo-Optical Instrumentation Engineers (SPIE)
Alison Gracias, Xiaojun Feng, Bai Xu, James Castracane, "Novel microfabrication approach of embedded SU8TM fluidic networks for cell transport on chips," Journal of Micro/Nanolithography, MEMS, and MOEMS 5(2), 021102 (1 April 2006). https://doi.org/10.1117/1.2200674 . Submission:
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