Versatile stepper based maskless microlithography using a liquid crystal display for direct write of binary and multilevel microstructures

Melanie M. Kessels; M. El Bouz; R. Pagan; Kevin J. Heggarty

doi:10.1117/1.2767331

1 July 2007 Versatile stepper based maskless microlithography using a liquid crystal display for direct write of binary and multilevel microstructures

Melanie M. Kessels, M. El Bouz, R. Pagan, Kevin J. Heggarty

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 6, Issue 3, 033002 (July 2007). https://doi.org/10.1117/1.2767331

Abstract

A versatile photolithographic photoplotter based on a standard photoreduction stepper, where the reticle is replaced by a commercial liquid crystal microdisplay, is reported. The microdisplay module is designed as a drop-in replacement, allowing the photoplotter to be simply and quickly converted into a standard stepper, making it an extremely versatile, low-cost research and development tool. Binary and multilevel plotting are demonstrated with plot rates of several Mpixels/s and 1-μm feature sizes into standard industrial photoresist. The limitations on plot rate and resolution are presented and techniques for overcoming them discussed.

©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Melanie M. Kessels, M. El Bouz, R. Pagan, and Kevin J. Heggarty "Versatile stepper based maskless microlithography using a liquid crystal display for direct write of binary and multilevel microstructures," Journal of Micro/Nanolithography, MEMS, and MOEMS 6(3), 033002 (1 July 2007). https://doi.org/10.1117/1.2767331

Published: 1 July 2007

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