Control of chemical residue on photomasks using thermal treatment

Han-Byul Kang; Yong-Dae Kim; Jong-Min Kim; Hyun-Joon Cho; Moon-Hwan Choi; Sang-Soo Choi; Jee-Hwan Bae; Cheol-Woong Yang

doi:10.1117/1.2435715

1 January 2007 Control of chemical residue on photomasks using thermal treatment

Han-Byul Kang; Yong-Dae Kim; Jong-Min Kim; Hyun-Joon Cho; Moon-Hwan Choi; Sang-Soo Choi; Jee-Hwan Bae; Cheol-Woong Yang

Author Affiliations +

J. of Micro/Nanolithography, MEMS, and MOEMS, 6(1), 013008 (2007). https://doi.org/10.1117/1.2435715

Abstract

We choose thermal treatment as part of a methodology to remove chemical residue on the surface of a mask. This new step of thermal treatment is inserted into our standard cleaning process for embedded attenuate phase shift masks (EAPSMs). The treatment is carried out in a modified hot plate system at various temperatures and times. After thermal treatment, ion chromatography measures the residual ions on a given surface. The thermal treatment is found to considerably reduce residual sulfate ions on the mask surface. The remaining sulfate ions on the mask are <0.18 ng/cm² using thermal treatment.

Citation Download Citation

Han-Byul Kang, Han-Byul Kang, Yong-Dae Kim, Yong-Dae Kim, Jong-Min Kim, Jong-Min Kim, Hyun-Joon Cho, Hyun-Joon Cho, Moon-Hwan Choi, Moon-Hwan Choi, Sang-Soo Choi, Sang-Soo Choi, Jee-Hwan Bae, Jee-Hwan Bae, Cheol-Woong Yang, Cheol-Woong Yang, } "Control of chemical residue on photomasks using thermal treatment," Journal of Micro/Nanolithography, MEMS, and MOEMS 6(1), 013008 (1 January 2007). https://doi.org/10.1117/1.2435715 . Submission:

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $20.00

Non-members: $25.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years