1 July 2007 Versatile stepper based maskless microlithography using a liquid crystal display for direct write of binary and multilevel microstructures
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Abstract
A versatile photolithographic photoplotter based on a standard photoreduction stepper, where the reticle is replaced by a commercial liquid crystal microdisplay, is reported. The microdisplay module is designed as a drop-in replacement, allowing the photoplotter to be simply and quickly converted into a standard stepper, making it an extremely versatile, low-cost research and development tool. Binary and multilevel plotting are demonstrated with plot rates of several Mpixels/s and 1-μm feature sizes into standard industrial photoresist. The limitations on plot rate and resolution are presented and techniques for overcoming them discussed.
© (2007) Society of Photo-Optical Instrumentation Engineers (SPIE)
Melanie M. Kessels, Melanie M. Kessels, M. El Bouz, M. El Bouz, R. Pagan, R. Pagan, Kevin J. Heggarty, Kevin J. Heggarty, } "Versatile stepper based maskless microlithography using a liquid crystal display for direct write of binary and multilevel microstructures," Journal of Micro/Nanolithography, MEMS, and MOEMS 6(3), 033002 (1 July 2007). https://doi.org/10.1117/1.2767331 . Submission:
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