1 October 2007 Lens-cementing technology used in optical systems of deep-ultroviolet wavelength regions
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In this work, a newly developed optical lens cementing technology is reported. A fluoride material is used as an optical cement that can reduce damage from deep-ultraviolet (DUV) radiation. The degradation of transmittance and the surface quality of the cemented optical elements, including adhesive used for cementing, are evaluated after prolonged DUV irradiation. It is shown that with a 248-nm wavelength, this cement works quite well, up to 1000 h of operation, and the change in transmittance is negligible where average irradiation power is within 27 to 37 mW/cm2. Hence for all practical purposes, the use of this cement in microscope objectives is quite acceptable for 248-nm applications, thus confirming that this cementing technology is satisfactory and meets the performance requirement of DUV inspection systems.
© (2007) Society of Photo-Optical Instrumentation Engineers (SPIE)
Takashi Takahashi, Takashi Takahashi, Toshiki Okumura, Toshiki Okumura, Etsuya Suzuki, Etsuya Suzuki, Tatsuya Kojima, Tatsuya Kojima, Hitoshi Suzuki, Hitoshi Suzuki, Toru Tojo, Toru Tojo, Koji Machida, Koji Machida, } "Lens-cementing technology used in optical systems of deep-ultroviolet wavelength regions," Journal of Micro/Nanolithography, MEMS, and MOEMS 6(4), 043010 (1 October 2007). https://doi.org/10.1117/1.2804125 . Submission:


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