1 October 2007 Parameter extraction from simple electrical measurements on surface micromachined cantilevers
Author Affiliations +
In surface micromachined structures, many parameters like geometry and Young's modulus depend on the process steps and need to be measured for accurate prediction of their functionality. This work discusses simple electrical measurement techniques on surface micromachined cantilever beams to determine Young's modulus, the gap between the beam and the substrate, and the thickness of a deposited aluminum layer on the beam. Cantilevers are ubiquitous in most microelectromechanical system (MEMS) sensors and actuators, and hence are ideal test structures. Pull-in, and a novel resonance frequency measurement based on the pull-in technique, are done on oxide anchored doped polysilicon beams at the wafer level, and some of the device and material properties are extracted from these measurements. The extracted values are compared with those determined from established methods like vibrometry and surface profiler measurements, and show good agreement. Since the measurements are all electrical, they can be part of standardized testing and are also suitable for packaged devices.
© (2007) Society of Photo-Optical Instrumentation Engineers (SPIE)
Somashekara Bhat, Enakshi Bhattacharya, "Parameter extraction from simple electrical measurements on surface micromachined cantilevers," Journal of Micro/Nanolithography, MEMS, and MOEMS 6(4), 043013 (1 October 2007). https://doi.org/10.1117/1.2794291 . Submission:


ICP etching of high Al mole fraction AlGaN
Proceedings of SPIE (October 12 2009)
Low-voltage CD-SEM applications in MEMS devices
Proceedings of SPIE (July 16 2002)
Novel cantilever-beam field-emission pressure sensor
Proceedings of SPIE (September 22 1993)
MEMS fixtures for handling and assembly of microparts
Proceedings of SPIE (August 31 1999)
Designing, fabrication, and test of a MEMS colloid thruster
Proceedings of SPIE (September 10 2002)

Back to Top