1 October 2007 Identification of process parameters of microfabrication with excimer laser
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J. of Micro/Nanolithography, MEMS, and MOEMS, 6(4), 049701 (2007). doi:10.1117/1.2795635
Abstract
The ablation of a polymethyl methacrylate (PMMA) substrate with a 248-nm long-pulsed KrF excimer laser is studied. PMMA is ablated at a laser pulse repetition rate (PRR) of 2, 5, and 10 Hz, and fluence varying from 0.2 to 1 J/cm2. The coupling effects of multiple shots, PRR, and fluence on the etching depth and topography of PMMA are discussed. It is observed that the etching rate and the ablation depth increase with the increase in fluence. The increase in the ablation depth with fluence is more significant at a higher number of shots. It is also observed that the etching rate decreases with the number of shots for a given fluence. An optimal combination is selected for the fabrication of a 100-μm-depth microchannel using styrene mask. The current microfabrication technique also demonstrates the use of low-cost masks.
Vikas Agrawal, Ritesh Devani, Sushanta K. Mitra, "Identification of process parameters of microfabrication with excimer laser," Journal of Micro/Nanolithography, MEMS, and MOEMS 6(4), 049701 (1 October 2007). http://dx.doi.org/10.1117/1.2795635
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KEYWORDS
Excimer lasers

Etching

Laser ablation

Polymethylmethacrylate

Photomasks

Microfabrication

Polymers

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