1 April 2008 Silicon grating microfabrication for long-range displacement sensor
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J. of Micro/Nanolithography, MEMS, and MOEMS, 7(2), 021007 (2008). doi:10.1117/1.2909459
Abstract
Silicon gratings are fabricated using micromachining techniques. The gratings are used with fiber optic probes to measure high-resolution and long-range linear displacements. Different parameters of the fabrication process such as the etching solution, the concentration of the etchant, and the temperature are optimized to achieve a mirror-like surface quality of the grating steps. For each parameter set, the resulting roughness and flatness are analyzed and discussed. Finally, linear displacement measurements are performed with the optimized grating as a component of a long-range fiber optic sensor. A resolution better than 34 nm and a measurement range up to 8.7 mm are obtained.
Ali Khiat, F. Lamarque, C. Prelle, A. Phataralaoha, Jan Dittmer, T. Krah, Monika Leester-Schaedel, Stephanus Büttgenbach, "Silicon grating microfabrication for long-range displacement sensor," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(2), 021007 (1 April 2008). https://doi.org/10.1117/1.2909459
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