1 April 2008 Requirements of MEMS membrane mirrors for focus adjustment and aberration correction in endoscopic confocal and optical coherence tomography imaging instruments
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Abstract
We explore the use of deformable membrane mirrors for primary focus control and spherical aberration correction in confocal microscopes and optical coherence tomography instruments that are miniaturized for in-situ imaging. Membrane requirements to achieve specified system performance are explored for both high and low numerical aperture regimes. Examples of both confocal imaging and focus-tracking optical coherence tomography using varifocus silicon nitride MEMS mirrors are presented. It is envisioned that future instruments with enhanced-stroke adaptive membrane mirrors will provide high fidelity microscopy and optical coherence tomography for diagnostic imaging of intact, living tissue.
© (2008) Society of Photo-Optical Instrumentation Engineers (SPIE)
David L. Dickensheets, David L. Dickensheets, } "Requirements of MEMS membrane mirrors for focus adjustment and aberration correction in endoscopic confocal and optical coherence tomography imaging instruments," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(2), 021008 (1 April 2008). https://doi.org/10.1117/1.2911024 . Submission:
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