1 July 2008 Novel two-dimensional micromachined accelerometer based on thermocapillary heat transfer
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J. of Micro/Nanolithography, MEMS, and MOEMS, 7(3), 033011 (2008). doi:10.1117/1.2959849
Abstract
We report a novel prototype of a two-dimensional micromachined accelerometer based on thermocapillary heat transfer. The only moving element in this accelerometer is a thermal bubble generated by vaporizing the working liquid in the microchamber. The accelerometer consists of two key components, a heating resistor for creating symmetrical temperature profiles and two pairs of temperature detectors placed symmetrically and orthogonally to each other. The prototype devices demonstrate that a sensitivity of 1.5°C/g for an operating power of 60 mW can be realized. The frequency response of the accelerometer containing deionized water is 200 Hz, and the corresponding noise equivalent acceleration is ~1 mg/Hz1/2.
Ke-Min Liao, Rongshun Chen, "Novel two-dimensional micromachined accelerometer based on thermocapillary heat transfer," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(3), 033011 (1 July 2008). http://dx.doi.org/10.1117/1.2959849
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KEYWORDS
Sensors

Liquids

Temperature sensors

Prototyping

Microfluidics

Computing systems

Signal detection

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