1 July 2008 Novel two-dimensional micromachined accelerometer based on thermocapillary heat transfer
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Abstract
We report a novel prototype of a two-dimensional micromachined accelerometer based on thermocapillary heat transfer. The only moving element in this accelerometer is a thermal bubble generated by vaporizing the working liquid in the microchamber. The accelerometer consists of two key components, a heating resistor for creating symmetrical temperature profiles and two pairs of temperature detectors placed symmetrically and orthogonally to each other. The prototype devices demonstrate that a sensitivity of 1.5°C/g for an operating power of 60 mW can be realized. The frequency response of the accelerometer containing deionized water is 200 Hz, and the corresponding noise equivalent acceleration is ~1 mg/Hz1/2.
© (2008) Society of Photo-Optical Instrumentation Engineers (SPIE)
Ke-Min Liao, Ke-Min Liao, Rongshun Chen, Rongshun Chen, } "Novel two-dimensional micromachined accelerometer based on thermocapillary heat transfer," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(3), 033011 (1 July 2008). https://doi.org/10.1117/1.2959849 . Submission:
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