1 July 2008 New approach of fabrication and dispensing of micromachined cesium vapor cell
Author Affiliations +
J. of Micro/Nanolithography, MEMS, and MOEMS, 7(3), 033013 (2008). doi:10.1117/1.2964288
Abstract
We describe the fabrication of wafer-scale alkali vapor cells based on silicon micromachining and anodic bonding. The principle of the proposed micromachined alkali cell is based on an extremely compact sealed vacuum cavity of a few cubic millimeters containing caesium vapors, illuminated by a high-frequency modulated laser beam. The alkali cells are formed by sealing an etched silicon wafer between two glass wafers. The technique of cell filling involves the use of an alkali dispenser. The activation of cesium vapors is made by local heating of the dispenser below temperature range causing degradations of cesium vapor purity. Thus, the procedure avoids negative effects of cesium chemistry on the quality of cell surfaces and sealing procedure. To demonstrate the clock operation, cesium absorption as well as coherent population trapping resonance was measured in the cells.
Lukasz Nieradko, Christophe Gorecki, Adel Douahi, Vincent Giordano, Jean-Charles Beugnot, Jan A. Dziuban, Marco Moraja, "New approach of fabrication and dispensing of micromachined cesium vapor cell," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(3), 033013 (1 July 2008). http://dx.doi.org/10.1117/1.2964288
JOURNAL ARTICLE
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KEYWORDS
Cesium

Absorption

Silicon

Atomic clocks

Glasses

Semiconducting wafers

Etching

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