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1 July 2008 Novel InP-based optical MEMS device
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Abstract
We present a method for the design and fabrication of InP-based free-standing microelectromechanical systems structures, which include microcantilever beams and Fabry–Perot membranes. The membrane is designed to satisfy both mechanical and optical requirements for a wavelength division multiplexing device and micro-Raman spectroscopy technique is used to evaluate surface stresses. The membrane profile is measured using a white-light interferometry technique, and the effect of the structure geometry on residual stress formation is discussed. From the results obtained, we propose a novel filter design that shows minimum surface profile deviation and stresses.
©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)
Cho Jui Tay, Ramam Akkipeddi, and M. Gopal "Novel InP-based optical MEMS device," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(3), 033016 (1 July 2008). https://doi.org/10.1117/1.2959175
Published: 1 July 2008
JOURNAL ARTICLE
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