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1 October 2008 In-plane rotary comb-drive actuator for a variable optical attenuator
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An in-plane rotary comb drive actuator was designed for variable optical attenuators (VOAs) that achieved large attenuation with fast response at low driving voltage. Actuator performance was improved by using a higher density of comb fingers for a smaller moment of inertia, serpentine flexure springs for a larger rotational angle, and symmetric spring arrangement for a higher radial shock resistance. A rotation of a tilted reflective mirror was used to further enhance the optical attenuation of VOA. The actuator, proposed with the size of 2 mm × 2 mm, achieved the bandwidth of 350 Hz and the deflection angle of 2.5 deg at 5 V, resulting in the maximum attenuation of 57 dB.
©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)
Max Ti-Kuang Hou, Jing-Yi Huang, Shiue-Shr Jiang, and Jer-Liang Andrew Yeh "In-plane rotary comb-drive actuator for a variable optical attenuator," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(4), 043015 (1 October 2008).
Published: 1 October 2008


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