1 October 2008 Design and characterization of a microheater array device fabricated with SwIFT-LiteTM
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Abstract
A microheater array device is designed and fabricated using the SwIFT-LiteTM process at Sandia National Laboratories. The device contains 18 individually controllable microheaters in a 3×6 array on a silicon substrate. The microheater array device was designed for use as a biosensor platform with a waveguide for real-time detection of DNA hybridization and melting as well as microfluidics for sample delivery. The design process including modeling, fabrication, and characterization of the heaters and waveguide is detailed. A FRET (florescence resonance energy transfer) system for DNA melting experiments is described, and the associated surface chemistry and microfluidic systems are discussed.
© (2008) Society of Photo-Optical Instrumentation Engineers (SPIE)
Layne D. Williams, Murat Okandan, Steve Blair, "Design and characterization of a microheater array device fabricated with SwIFT-LiteTM," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(4), 043035 (1 October 2008). https://doi.org/10.1117/1.3013457 . Submission:
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