1 January 2009 Making double patterning cost single
Author Affiliations +
J. of Micro/Nanolithography, MEMS, and MOEMS, 8(1), 010101 (2009). doi:10.1117/1.3098441
Abstract
This PDF file contains the editorial “Making double patterning cost single” for JM3 Vol. 8 Issue 01
Burn J. Lin, "Making double patterning cost single," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(1), 010101 (1 January 2009). http://dx.doi.org/10.1117/1.3098441
Submission: Received ; Accepted
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KEYWORDS
Double patterning technology

Photomasks

Optical lithography

Scanners

Reticles

Beam splitters

3D scanning

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