1 July 2009 Guest Editorial: Computational Lithography
Author Affiliations +
J. of Micro/Nanolithography, MEMS, and MOEMS, 8(3), 031401 (2009). doi:10.1117/1.3240492
Abstract
This PDF file contains the editorial “Guest Editorial: Computational Lithography” for JM3 Vol. 8 Issue 03
Donis G. Flagello, Chris A. Mack, "Guest Editorial: Computational Lithography," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(3), 031401 (1 July 2009). http://dx.doi.org/10.1117/1.3240492
Submission: Received ; Accepted
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KEYWORDS
Computational lithography

Lithography

Imaging systems

Optics manufacturing

Optical design

Computing systems

Optical proximity correction

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