1 April 2009 Design and fabrication of a novel single-chip MEMS capacitive microphone using slotted diaphragm
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Abstract
A novel single-chip microelectromechanical systems (MEMS) capacitive microphone with a slotted diaphragm for sound sensing is developed to minimize the microphone size and improve the sensitivity by decreasing the mechanical stiffness of the diaphragm. According to the results, a clamped microphone with a 2.43×2.43-mm2 diaphragm and a slotted one with a 1.5-×1.5-mm2 diaphragm have the same mechanical sensitivity, but the size of slotted microphone is at least 1.62 times smaller than clamped structure. The results also yield a sensitivity of 5.33×10−6 pF/Pa for the clamped and 3.87×10−5 pF/Pa for the slotted microphone with a 0.5×0.5-mm2 diaphragm. The sensitivity of the slotted diaphragm is increased 7.27 times. The calculated pull-in voltage of the clamped microphone is 214 V, the measured pull-in voltage of the slotted one is 120 V. The pull-in voltage of the slotted microphone is about 50% decreased.
© (2009) Society of Photo-Optical Instrumentation Engineers (SPIE)
Bahram Azizollah Ganji, Bahram Azizollah Ganji, Burhanuddin Yeop Majlis, Burhanuddin Yeop Majlis, } "Design and fabrication of a novel single-chip MEMS capacitive microphone using slotted diaphragm," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(2), 021112 (1 April 2009). https://doi.org/10.1117/1.3091941 . Submission:
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