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1 April 2009 Experiments and results of the silicon micromachined gyroscope
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Abstract
We report a multifunctional silicon micromachined gyroscope. The gyroscope can sense the rolling, yawing, and pitching angular velocity synchronously. Both the principle and the experiment of the gyroscope are presented to explain the multifunction. We also discuss the way to determine the deflecting direction and deflecting position of the rotating carrier in the gravitation field.
©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)
Fu-Xue Zhang, Qing-Wen Yan, and Wei Zhang "Experiments and results of the silicon micromachined gyroscope," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(2), 021130 (1 April 2009). https://doi.org/10.1117/1.3122366
Published: 1 April 2009
JOURNAL ARTICLE
6 PAGES


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