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1 July 2009 Simulation and analysis of electromagnetic in-plane microgenerator
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This study focuses on the design, simulation, fabrication, and test of the in-plane microgenerator to obtain a high-power output. The microgenerator comprises multilayer planar silver (Ag) microcoil of low-temperature cofired ceramics (LTCC) and multipole hard magnet of Nd/Fe/B (neodymium, iron, and boron). The LTCC process is an approach that saves costs and time to fabricate the microcoil. The multipole hard magnet of Nd/Fe/B provides the large magnetic energy product to contribute to the power. Finite element simulations have been carried out using COMSOL Multiphysics® to observe electromagnetic information. The induced voltages of coils in different basic geometric shapes, including square-shaped coils, circle-shaped coils, and sector-shaped coils, are simulated separately in this study. A prototype of the microgenerator is <1 cm3 in volume size. The simulated result can be compared to the experimental one. The results of simulation reveal that this microgenerator with a sector-shaped microcoil generates a maximum effective value of the induced voltage of 232.7 mV and the power of 2.5 mW. And the 1-µm gap between the microcoil and the magnet achieved is the value that is mentioned above. Experimental measurement shows close agreement with finite element simulations.
©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)
C. T. Pan, Y. J. Chen, and Sheng-Chih Shen "Simulation and analysis of electromagnetic in-plane microgenerator," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(3), 031304 (1 July 2009).
Published: 1 July 2009

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