1 July 2009 Orientation Zernike polynomials: a useful way to describe the polarization effects of optical imaging systems
Author Affiliations +
Abstract
We introduce the new concept of orientation Zernike polynomials, a base function representation of retardation and diattenuation in close analogy to the wavefront description by scalar Zernike polynomials. We show that the orientation Zernike polynomials provide a complete and systematic description of vector imaging using high numerical aperture lithography lenses and, hence, a basis for an in depth understanding of both polarized and unpolarized imaging, and its modeling.
© (2009) Society of Photo-Optical Instrumentation Engineers (SPIE)
Johannes Ruoff, Michael Totzeck, "Orientation Zernike polynomials: a useful way to describe the polarization effects of optical imaging systems," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(3), 031404 (1 July 2009). https://doi.org/10.1117/1.3173803 . Submission:
JOURNAL ARTICLE
22 PAGES


SHARE
Back to Top