1 October 2009 In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing
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Abstract
A novel inverse approach is proposed for in situ measurement of gas diffusion properties of polymeric seals used in microelectromechanical systems (MEMS) packages. The cavity pressure evolution of a polymer-sealed MEMS package subjected to a constant bombing pressure is documented as a function of time using classical interferometry, and the diffusion properties of the polymeric seal are subsequently determined from the measured pressure history. A comprehensive numerical procedure for the inverse analysis is established considering three diffusion regimes that characterize the leak behavior through a polymeric seal. The method is implemented to determine the helium diffusivity and solubility of a polymeric seal.
© (2009) Society of Photo-Optical Instrumentation Engineers (SPIE)
Changsoo Jang, Arindam Goswami, Bongtae Han, Suk-Jin Ham, "In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(4), 043025 (1 October 2009). https://doi.org/10.1117/1.3227904 . Submission:
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