1 April 2010 Metallic-tilted woodpile photonic crystals in the midinfrared
Author Affiliations +
J. of Micro/Nanolithography, MEMS, and MOEMS, 9(2), 023011 (2010). doi:10.1117/1.3427162
We demonstrate a large area production of 3-D woodpile metallic photonic crystals using deep x-ray lithography and subsequent electroforming. These structures represent the 〈110〉 orientation of the 〈001〉 woodpile structures most commonly presented in the literature. This approach requires no alignment and is capable of generating a 3 unit cell thick photonic crystal in a simple three step process flow. Tilted woodpiles demonstrate band characteristics very similar to those observed from [001] woodpiles. Reflectivity tests show a band edge around 4 µm and good comparison well with numerical simulations.
J. D. Williams, Po Sun, William C. Sweatt, A. Robert Ellis, "Metallic-tilted woodpile photonic crystals in the midinfrared," Journal of Micro/Nanolithography, MEMS, and MOEMS 9(2), 023011 (1 April 2010). https://doi.org/10.1117/1.3427162


Micromachining using Helios
Proceedings of SPIE (May 19 1995)
Zone plate for x-ray applications
Proceedings of SPIE (January 05 2001)
Thick silicon membranes as mask blank for SU 8 x...
Proceedings of SPIE (August 20 2001)
Tilted logpile photonic crystals using the LIGA technique
Proceedings of SPIE (September 05 2006)

Back to Top