1 April 2010 Metallic-tilted woodpile photonic crystals in the midinfrared
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Abstract
We demonstrate a large area production of 3-D woodpile metallic photonic crystals using deep x-ray lithography and subsequent electroforming. These structures represent the 〈110〉 orientation of the 〈001〉 woodpile structures most commonly presented in the literature. This approach requires no alignment and is capable of generating a 3 unit cell thick photonic crystal in a simple three step process flow. Tilted woodpiles demonstrate band characteristics very similar to those observed from [001] woodpiles. Reflectivity tests show a band edge around 4 µm and good comparison well with numerical simulations.
© (2010) Society of Photo-Optical Instrumentation Engineers (SPIE)
J. D. Williams, J. D. Williams, Po Sun, Po Sun, William C. Sweatt, William C. Sweatt, A. Robert Ellis, A. Robert Ellis, } "Metallic-tilted woodpile photonic crystals in the midinfrared," Journal of Micro/Nanolithography, MEMS, and MOEMS 9(2), 023011 (1 April 2010). https://doi.org/10.1117/1.3427162 . Submission:
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