Editorial: Mourning the loss of Prof. Franco Cerrina

Burn J. Lin

doi:10.1117/1.3497356

1 July 2010 Mourning the loss of Prof. Franco Cerrina

Burn J. Lin

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 9, Issue 3, 030101 (July 2010). https://doi.org/10.1117/1.3497356

This PDF file contains the editorial “Editorial: Mourning the loss of Prof. Franco Cerrina” for JM3 Vol. 9 Issue 03

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Burn J. Lin "Mourning the loss of Prof. Franco Cerrina," Journal of Micro/Nanolithography, MEMS, and MOEMS 9(3), 030101 (1 July 2010). https://doi.org/10.1117/1.3497356

Published: 1 July 2010

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KEYWORDS

Extreme ultraviolet

Heart

Lithography

Printing

X-ray lithography

X-rays

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