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1 October 2010
Impact factor of JM3
Burn J. Lin
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Burn J. Lin
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1
Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)
Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 9, Issue 4
, 040101 (October 2010).
https://doi.org/10.1117/1.3511517
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This PDF file contains the editorial “Editorial: Impact factor of JM3” for JM3 Vol. 9 Issue 04
©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)
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Burn J. Lin
"Impact factor of JM3,"
Journal of Micro/Nanolithography, MEMS, and MOEMS
9(4), 040101 (1 October 2010).
https://doi.org/10.1117/1.3511517
Published: 1 October 2010
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KEYWORDS
Iterated function systems
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Burn J. Lin, "Impact factor of JM3," J. Micro/Nanolith. MEMS MOEMS 9(4) 040101 (1 October 2010)
https://doi.org/10.1117/1.3511517
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