An exposure method is proposed to test the focusing properties of subwavelength photon sieves. To solve the problems caused by the subwavelength photon sieves (such as short focal length and small focal spot size), a grating moiré fringe phase detection technique and a microcontact sensor with lead zirconium titanate (PZT) stepping hybrid technique are used in the experimental setup. The focusing properties of the subwavelength photon sieves are tested by this setup. The results show that the focal length and the focal spot size are close to the designed value. Finally, the intensity distribution of the focal spot is proposed. This research result will be beneficial for understanding the focusing properties of subwavelength photon sieves, will help us to improve the imaging quality, and will provide a good experimental basis for practical applications in the nanolithography field.
"Experimental testing of focusing properties of subwavelength photon sieves using exposure method," Journal of Nanophotonics 10(2), 026003 (7 April 2016). https://doi.org/10.1117/1.JNP.10.026003