19 July 2016 Low-stress phase plates produced by serial bideposition of TiO2 thin films
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Abstract
The stresses in thin films are one of the main problems in the development of small dimensions or thin optical components. In order to produce low-tension anisotropic coatings, the characterization of serial bideposition is essential. Structural and optical performance have been tested for anisotropic TiO2 thin films deposited by serial bideposition technique. Three-dimensional surface interferometric measurements were performed for samples deposited at various angles. Also experimental observations of anisotropic tensions in annealed two-dimensional sculptured thin films of TiO2 material are presented. The deposition angle of 80 deg is considered to be the most applicable for developing optical components due to the befitting optical performance and the lowest tensions before and after the annealing.
© 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)
Tomas Tolenis, Tomas Tolenis, Lina Grinevičiūtė, Lina Grinevičiūtė, Lina Mažulė, Lina Mažulė, Algirdas Selskis, Algirdas Selskis, Ramutis Drazdys, Ramutis Drazdys, } "Low-stress phase plates produced by serial bideposition of TiO2 thin films," Journal of Nanophotonics 10(3), 036003 (19 July 2016). https://doi.org/10.1117/1.JNP.10.036003 . Submission:
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