10 February 2017 Designing a scanning probe microscope for in situ study of carbon materials growth processes during chemical vapor deposition
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Abstract
The development of methods for in situ analysis is required to provide deeper understanding of carbon film materials formation during chemical vapor deposition (CVD). Here, we describe scanning probe microscope instrument designed for study of nucleation and growth of thin film materials obtained by carbon condensation from a hydrogen/methane gas mixture activated by the “hot filament” method. The microscope allows measurements of topology characteristics, width of band gap, Fermi level position, and electrical conductivity of the carbon film material during its formation in the CVD process. We present the design and the characteristics of the microscope in this paper.
© 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)
Artem Borisovich Loginov, Artem Borisovich Loginov, Rinat Ramilovich Ismagilov, Rinat Ramilovich Ismagilov, } "Designing a scanning probe microscope for in situ study of carbon materials growth processes during chemical vapor deposition," Journal of Nanophotonics 11(3), 032509 (10 February 2017). https://doi.org/10.1117/1.JNP.11.032509 . Submission: Received: 15 November 2016; Accepted: 24 January 2017
Received: 15 November 2016; Accepted: 24 January 2017; Published: 10 February 2017
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