8 May 2018 UV-C whispering-gallery modes in AlN microdisks with AlGaN-based multiple quantum wells on Si substrate
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Abstract
We have successfully fabricated 7-μm 155-nm-thick undercut microdisk cavities with AlN  /  Al0.60Ga0.40N (5.5  nm  /  2.5  nm) multiple quantum wells epitaxially grown on Si substrate by metal–organic chemical vapor deposition. Upon optical pumping, whispering-gallery modes (WGMs) with wavelengths around ∼250  nm can be observed throughout the photoluminescence spectrum at room temperature, with quality factors around 500 to 1000. These cavity modes have been analyzed by theoretical calculations. Our results suggest great potentials to demonstrate WGM lasing in the UVC range from these AlGaN/AlN-on-Si microdisk cavities monolithically grown on a Si platform.
© 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)
Yiyun Zhang, Hongjian Li, Lining Liu, Panpan Li, Liancheng Wang, Xiaoyan Yi, Guohong Wang, "UV-C whispering-gallery modes in AlN microdisks with AlGaN-based multiple quantum wells on Si substrate," Journal of Nanophotonics 12(4), 043502 (8 May 2018). https://doi.org/10.1117/1.JNP.12.043502 Submission: Received 15 March 2018; Accepted 18 April 2018
Submission: Received 15 March 2018; Accepted 18 April 2018
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