18 May 2018 Loss analysis in nitride deep ultraviolet planar cavity
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Abstract
In recent decades, literatures about visible vertical cavity surface emitting lasers (VCSELs) have been reported. However, due to high optical loss in the cavity, lasing from deep ultraviolet (DUV) VCSEL was still rarely achieved. The optical loss in nitride DUV microcavity was analyzed in detail. DUV nitride vertical Fabry–Pérot microcavity with active layer of AlGaN-based quantum dots and double-side HfO2  /  SiO2 distributed bragger reflectors was fabricated. Optical losses with of the order of 103  cm  −  1 were deduced from the Q value of the cavity modes. The main origination of optical loss in DUV cavity was calculated and ascribed to the interface scattering. The interface roughness appearing after laser lift-off process and overlap between rough interface and standing optical wave were two key parameters that contributed to interface scattering loss. We believe that our results will provide useful information for improving DUV VCSEL devices.
© 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)
Zhongming Zheng, Zhongming Zheng, Yingqian Li, Yingqian Li, Onkundi Paul, Onkundi Paul, Hao Long, Hao Long, Samuel Matta, Samuel Matta, Mathieu Leroux, Mathieu Leroux, Julien Brault, Julien Brault, Leiying Ying, Leiying Ying, Zhiwei Zheng, Zhiwei Zheng, Baoping Zhang, Baoping Zhang, } "Loss analysis in nitride deep ultraviolet planar cavity," Journal of Nanophotonics 12(4), 043504 (18 May 2018). https://doi.org/10.1117/1.JNP.12.043504 . Submission: Received: 13 April 2018; Accepted: 3 May 2018
Received: 13 April 2018; Accepted: 3 May 2018; Published: 18 May 2018
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