(GaIn)2O3 nanostructures are synthesized successfully via chemical vapor deposition without any other reaction or catalyzer material. The morphology and crystal structure are characterized by an energy dispersive spectrometer, scanning electron microscopy, x-ray diffraction (XRD) analytic technologies, and photoluminescence (PL) spectra. With the increasing of temperature, the structure changed from monoclinic to cubic, while the morphology changed from column to spherical. The evolution of the structure and morphology should associate with the variation of the indium content of the (GaIn)2O3. The room temperature PL shows a wide emission band, which confirms the cubic and monoclinic structures reveled by XRD. The obtained (GaIn)2O3 with different morphologies and structures can offer different choices for applications.
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