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18 May 2020 Electrostatic modulation of a photonic crystal resonant filter
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Abstract

We demonstrate continuous and reversible spectral modulation of a photonic crystal cavity resonant mode using electrostatic force. The design and simulation of an H0 cavity were done using finite-element analysis methods. Fabrication of the sample device was done in a cleanroom using state-of-the-art nanotechnologies that are compatible with fabrication techniques for complementary metal-oxide semiconductors and microelectromechanical systems. Upon the change of the applied bias voltage, the resonant tuning effect is quantitatively demonstrated. Furthermore, the dynamic response of the transmission output intensity with respect to the oscillating applied voltage is demonstrated.

© 2020 Society of Photo-Optical Instrumentation Engineers (SPIE) 1934-2608/2020/$28.00 © 2020 SPIE
Hoang M. Nguyen and Tung Bui Thanh "Electrostatic modulation of a photonic crystal resonant filter," Journal of Nanophotonics 14(2), 026014 (18 May 2020). https://doi.org/10.1117/1.JNP.14.026014
Received: 10 December 2019; Accepted: 5 May 2020; Published: 18 May 2020
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