1 March 2010 Commentary: Multichannel ellipsometry for monitoring processes
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J. of Nanophotonics, 4(1), 040302 (2010). doi:10.1117/1.3374056
Abstract
This PDF contains the commentary "Multichannel ellipsometry for monitoring processes."
Ilsin An, "Commentary: Multichannel ellipsometry for monitoring processes," Journal of Nanophotonics 4(1), 040302 (1 March 2010). http://dx.doi.org/10.1117/1.3374056
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KEYWORDS
Ellipsometry

Sensors

Thin films

Gold

Spectroscopy

Crystals

Spectroscopic ellipsometry

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